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Emerging semiconductor technology : a symposium / sponsored by ASTM Committee F-1 on Electronics, San Jose, CA, 28-31 Jan. 1986 ; Dinesh C. Gupta and Paul H. Langer, editors.

By: Contributor(s): Material type: TextTextLanguage: English Series: ASTM special technical publication ; 960Publication details: Philadelphia, PA : American Society for Testing and Materials, c1987.Description: 704 p. : ill. ; 24 cmISBN:
  • 0803104596
Subject(s): DDC classification:
  • 621.38152 19 GUE 1987
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Holdings
Item type Current library Call number Status Date due Barcode
Books Books Eastern University Library General Stacks 621.38152 GUE 1987 (Browse shelf(Opens below)) Not For Loan 02416

Papers presented at the Fourth International Symposium on Semiconductor Processing.

"ASTM publication code number (PCN) 04-960000-46."

Includes bibliographies and indexes.

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